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                                       Details for article 1383 of 6539 found articles
 
 
  Effect of O2/Ar flow ratio and heat treatment on the structure and properties of SiO2 film prepared by magnetron sputtering
 
 
Title: Effect of O2/Ar flow ratio and heat treatment on the structure and properties of SiO2 film prepared by magnetron sputtering
Author: Wang, Luoshu
Zhao, Changjiang
Zhao, Leran
Fan, Xiaowei
Wang, Qingguo
Liu, Juncheng
Appeared in: Physica. B, Condensed matter
Paging: Volume 630 () nr. C pages p.
Year: 2022
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 1383 of 6539 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands